Flat Panel Display Vacuum Chucks

Surface Finishes achieves flatness of  < 0.5 microns peak-to-valley on large area flat panel display vacuum chuck and lithography stage surfaces.

Offerings:

• 

  FPD Vacuum Chuck Courtesy: Azores Corporation

  Precision Lapping Services for Vacuum Chucks and Lithography Stages

• Custom Fabrication and Reconditioning Services
• SiC, Aluminum, Alumina Ceramic, Corrax^® and Invar^® Stages and Chucks
• Anodized, Ni Plated, PTFE and HVOF Tungsten Carbide Coated
• Other

Resulting Benefits:

• Reduced Local Slope
• Improved Resolution
• Improved Thermal Stability

Corrax^® is a registered trademark of the Bohler-Uddeholm Corporation.  Invar^® is a registered trademark of Imphy Alloys.