Flat Panel Display Vacuum Chucks

Flat Panel Display Vacuum Chucks

Surface Finishes achieves flatness of  < 0.5 microns peak-to-valley on large area flat panel display vacuum chuck and lithography stage surfaces.

Offerings:

  • Flat Panel Display Vacuum Chucks

    FPD Vacuum Chuck Courtesy: Azores Corporation

    Precision Lapping Services for Vacuum Chucks and Lithography Stages

  • Custom Fabrication and Reconditioning Services
  • SiC, Aluminum, Alumina Ceramic, Corrax® and Invar® Stages and Chucks
  • Anodized, Ni Plated, PTFE and HVOF Tungsten Carbide Coated
  • Other

Resulting Benefits:

  • Reduced Local Slope
  • Improved Resolution
  • Improved Thermal Stability

 

Corrax® is a registered trademark of the Bohler-Uddeholm Corporation.  Invar® is a registered trademark of Imphy Alloys.

Address

CMPC Surface Finishes
39 W. Official Rd.
Addison, IL 60101-4592
Telephone: (630) 543-6682
Fax: (630) 543-4013

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