Flat Panel Display Vacuum Chucks
Surface Finishes achieves flatness of < 0.5 microns peak-to-valley on large area flat panel display vacuum chuck and lithography stage surfaces.
Offerings:
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FPD Vacuum Chuck Courtesy: Azores Corporation
Precision Lapping Services for Vacuum Chucks and Lithography Stages
- Custom Fabrication and Reconditioning Services
- SiC, Aluminum, Alumina Ceramic, Corrax® and Invar® Stages and Chucks
- Anodized, Ni Plated, PTFE and HVOF Tungsten Carbide Coated
- Other
Resulting Benefits:
- Reduced Local Slope
- Improved Resolution
- Improved Thermal Stability
Corrax® is a registered trademark of the Bohler-Uddeholm Corporation. Invar® is a registered trademark of Imphy Alloys.