Semiconductor Tooling and Parts
Capital equipment component fabrication, finishing and refurbishment services for the semiconductor device and flat panel display industries.
Wafer Chucks
Offerings:
- Lithography Stages
- Wafer Chucks
- Electrostatic, RTP, Pin, Vacuum, Ceramic, Other
- Wafer Mounting Blocks
- Alumina, SiC
- CMP Retaining Rings
- PPS, PET, Delrin, PEEK, Other
- Polishing Head and Platen Refurbishment
- Reticle Holders for Lithography Systems
