Semiconductor Tooling and Parts

Semiconductor Tooling and Parts

Capital equipment component fabrication, finishing and refurbishment services for the semiconductor device and flat panel display industries.

Semiconductor Tooling and Parts

Wafer Chucks


  • Lithography Stages
  • Wafer Chucks
    • Electrostatic, RTP, Pin, Vacuum, Ceramic, Other
  • Wafer Mounting Blocks
    • Alumina, SiC
  • CMP Retaining Rings
    • PPS, PET, Delrin, PEEK, Other
  • Polishing Head and Platen Refurbishment
  • Reticle Holders for Lithography Systems


Surface Finishes
39 W. Official Rd.
Addison, IL 60101-4592
Telephone: (630) 543-6682
Fax: (630) 543-4013

Technical Resources