Wafer Chucks Applications

Wafer Chucks

Custom fabrication, refurbishment and repair of precision chucks for wafer polishing, lithography, test, measurement, deposition and die repair.

Wafer Chucks

Anodized Vacuum Chuck


  • Electrostatic, RTP, Pin, and Vacuum Chucks
  • SiC, Aluminum, Alumina, Anodized, Ni Plated, Ailicon
  • Custom Fabrication and Refurbishment Services
  • Other


Resulting Benefits:

  • Wafer Chucks

    SiC Pin Chuck

    Reduced Cost of Ownership

  • Increased Yield
  • Improved Quality
  • Reduced Variability


Surface Finishes
39 W. Official Rd.
Addison, IL 60101-4592
Telephone: (630) 543-6682
Fax: (630) 543-4013

Technical Resources