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World's Mightiest Microscope

Chicago firm tops in precision machining

John J. Kendrick

Gailieo didn't know what he'd see when he built the first telescope. Likewise, researchers don't know what they might uncover with the world's most powerful microscope.

Built at the University of Chicago, it is 12 feet long and weighs two tons. It will provide the most intimate look yet at the rare world of atomic particles. Scientists-for the first time- will peer inside dense clusters of atoms whose composition, until now, has remained a mystery.

University of Chicago physicist Albert Crewe, former director of Argonne National Laboratory, headed the three-year project to build the world's most powerful electron microscope. The instrument consists of hundreds of ultra-precise components with mandated manufacturing tolerances of 50 millionths of and inch and less.

Electron microscopy

Crewe, has been advancing the state of the art in electron microscopy for 20 years. In 1964 he invented the high-resolution scanning transmission electron microscope. In 1970 he used it to take the first photographs of isolated atoms. The new microscope is possible because two years ago Crewe discovered a way to correct aberrations in the magnetic lenses used in electron microscopes. He says the new device should resolve objects measuring as small as one half of an angstrom. Existing microscopes can directly resolve objects only if they are about tow angstroms in size. The new microscope is expected to have a resolution of 0.5 angstroms. Currently, the world's most powerful microscope has a resolution of 1.6 angstroms.

Crewe intends to observe how atoms interact with their neighbors. Sharper pictures of how they behave in small groups could lead to important advances in electronics, metallurgy, ceramics and life sciences.

Precision machining

Primarily funded by the National Science Foundation, the project has received a $1 million computer equipment donation from IBM and $500,000 donation in precision metalworking services from the Chicago-based Tool & Die Institute.

"For this microscope to function according to design specifications, every mechanical and electrical component part must be machined to the most exacting tolerance levels," Crewe said.

The design called for a margin of error of no more than 50 millionths of an inch, but the institute members were able to reduce that error margin to 20 millionths of an inch, said Greg Panek, head of the institute's voluntary effort.

One firm, Surface Finishes of Addison, IL (Chicago suburb) surpassed all expectations for dimensional tolerances on flat surfaces. They held flatness to one quarter of a wavelength of a helium neon laser, equal to five millionths of an inch.

Exotic materials and difficult shapes

The University of Chicago provided the specifications and materials. The tool and die makers determined how to machine and measure the components. Despite machining at what both scientists and manufacturers termed a "ridiculous tolerance," Gregg Panek, president of Panek Precision Products, said the tolerances were easy compared to other problems, like difficult-to-machine metals and machining intricate shapes. Materials included consumet iron (more than 99.5 percent pure), beryllium copper, silicon aluminum bronze, stainless steel 304 and platinum. In some cases, measuring the part afterward was more difficult than machining it, he said.

Some manufacturers working on the project said they were able to machine intricate shapes with electrical discharge machines (EDM). In other cases, the solution turned out to be in the design of complex fixtures and jigs.

Mark Drzewiecki, president/owner of Surface Finishes (SFI), said that consumet iron posed the most problems in his machining. He said efforts to machine it with carbide and ceramic cutting tools failed. Carpenter Technology Inc., producers of the iron, solved the problem by using high-speed steel cutting tools. On other parts, Drzewiecki said, they used free abrasive machines that are usually used to manufacture glass lenses. Because they provide low stress, low heat and close tolerances, they were helpful in machining the metal also. The disadvantage is that they are extremely slow, he said.

To comply with the measurement accuracy needed, Drzewiecki said they used several types of interferometry technology (light interference). Panek said participating members were using a wide variety of both contact and noncontact gaging methods. Lasers were used for many flat components while three-axis coordinate measuring machines solved other measurement problems.

Twenty millionths- no problem

Much of the most exacting work was performed by Surface Finishes, a small firm with 25 employees. The company produces air bearings for semiconductor wafer manufacturing and laser mirrors for aircraft reconnaissance systems accurate to within two millionths of and inch. For the microscope, the firm donated more than 350 hours of labor to produce magnetic lens housings.

"When Professor Crewe first came to us with his drawings, he didn't think we could reach even 50 millionths accuracy," said Drzewiecki. "When I told him we could reach 20 millionths with no problem, he was surprised and delighted."

"Finishing to accuracies in millionths, with surface condition to less than one microinch, is in itself a problem. Even more critical is the problem of developing equipment and technology to measure results," Drzewiecki said.

"Tenths" accuracy has become "coarse" measurement. The growing trend over the past 10 years is to specify flatness, straightness and roundness requirements in millionths. Squareness needs of less than one arc second are common. As for surface finishes, demand for less than one microinch is becoming standard for many applications.

SFI uses a Cartrilamp, flatness measuring, monochromatic inspection light, which they manufacture, to show flatness accuracy to millionths of and inch. Parts are placed on top of an optical flat and checked in a viewing mirror. This proves to be faster than methods that require placing the flat on top of the part, checking the part, and then lifting the flat off the part again. It is also more accurate because it eliminates the distortion or erroneous readings caused by the weight of the flat on the part, according to Drzewiecki.

The Cartrilamp standard for measuring the workpiece is calibrated against a master standard that has an accuracy 10 times greater than the tolerance being measured on the Cartrilamp. A calibration report from the National Bureau of Standards (NBS) shows a total deviation of less than one millionth of an inch on the master flat (Figure 4).

Figure 1. Figure 2
Figure 1
Uranium atoms on a thin film of carbon atoms
as seen by Albert Crewe's first microscope
in 1978. Crewe's new microscope,
when fully operational, will magnify the atoms
much greater

   
Figure 2
Mark Drzewiecki, president, Surface Finishes Co. and
Dr. Albert Crewe, physicist, University of Chicago.

   
Figure 3 Figure 4
Figure 3
Scanning transmission electron microscope (STEM)
is designed to be three times more powerful than
any other existing microscope.

   
Figure 4
   

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